Fully automated wafer level inspection

IMS facilitates the ramp-up challenges the photonics industry is facing now and in the near future. To achieve this ramp-up, process stability, quality and yield are some of the key parameters to get grip on as a foundry.

This is where our Helios system comes in. Helios is a state-of-the-art fully automated machine for Photonic Visual Inspection. It is developed dedicated for the integrated photonics industry. It is in close collaboration with key players in the industry for high quality.

Helios can play an important role in speeding up design iterations on PDK’s and building block designs and process development and of course in-line process control.

25 years of experience and photonics

IMS is developing multiple products for the photonics industry in testing and metrology. When combining 25+ years of experience on production automation and precision manufacturing with the knowledge and experience of the photonics ecosystem, we are taking big steps in the field of metrology with our new Photonic Visual Inspection Tool (PVIT) Helios.

Our metrology and testing equipment are built on our modular MEKOPP platform. This will enable future upgrades of the equipment to stay in touch with the industries demand on testing and metrology and throughput needs.

Automated wafer inspection

Helios is capable of inspecting 100mm, 150mm and 200mm (4 inch, 6 inch, 8 inch) photonic wafers in a cleanroom environment. It is capable of handling multiple types of photonic wafers (e.g. indium phosphide and silicon nitride). Specially developed and trained AI algorithms in combination with its high- and low resolution modes, it can inspect wafers for many types of errors like waveguide interruptions or intersection checks, particle and residue contamination and bare wafer inspections at different throughput levels.

Helios can be used as an inline AOI tool in the front-end process. Photonic wafers will pass through the inspection tool in between production steps such as litho and etching. While inspection recipes and inspection reports are exchanged with the foundry MES system.

Recipe editor

Helios also comes with a recipe editor and annotation tool. A very powerful tool in inspecting recipes. It can easily be configured and fine-tuned. Also retraining and fine tuning of the AI algorithms to the foundries specific needs with our annotation tool is possible.

Helios demonstration

Helios is ready and operatable for a demo today. Contact us to request a demonstration of this innovative machine. We are happy to welcome you in Almelo.